Upgrade error

I'm trying to upgrade to the latest version of Revo, have done other domains without any issue but I get an error when I go to the setup (see attached) Something to with the smarty_internal_write_file.php and smarty_internal_template.php It doesn't allow me to access the setup. I haven't done anything different from the other upgrades I've done but was hoping someone might have a suggestion.

Are the folder permisions set correctly?

Yes, checked those, I've deleted all the folders off the server and am now trying a re-upload to see if that works

That didn't work, still getting the same error.

Hmm. Emptied your site Cache before going to setup? Seems it's stumbling upon some cached files.